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ACM Research Enters Dry Processing Market with Launch of Ultra Furnace
- ACM’s First Furnace Product Targets LPCVD Initially, Oxidation, Annealing and ALD in Future
- Demonstrates Effectiveness of
Koreaand China R&D Team Collaboration
“Advanced technology nodes present ongoing challenges that require innovation from the capital equipment suppliers. This demanding environment provides significant opportunities for ACM,” explained Dr.
“The Ultra Furnace product is the result of collaboration between our talented experts in
Deposition processes utilize process gases at a high temperature to react with each other on a silicon wafer, forming a silicon oxide or nitride layer on the wafers. The Ultra Furnace system is intended for batch processing of up to 100 12-inch (300mm) wafers. The innovative system design combines newly developed hardware that improves durability, with the company’s proven software technology and a proprietary control system and algorithm. This enables the tool to provide stable control of pressure, gas flow rate and temperature.
While the Ultra Furnace system targets LPCVD processes, with a few changes to the components and layout, each tool can address other target applications. About 85 percent of the hardware configuration remains unchanged, so the alterations for the new application can be achieved efficiently.
To learn more about the Ultra Furnace, please call the ACM contact for your region listed below.
ACM develops, manufactures and sells semiconductor process equipment for single wafer or batch wet cleaning, Electroplating, Stress free polishing and thermal process are critical to advanced semiconductor device manufacturing, as well as wafer-level packaging. The company is committed to delivering customized, high performance, cost-effective process solutions that semiconductor manufacturers can use in numerous manufacturing steps to improve productivity and product yield.
Statements contained in the second paragraph of this press release are not historical facts and may be forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995. Forward-looking statements include statements regarding the intent, belief or current expectations with respect to the potential success of the offering and sale of the Ultra Furnace system. Such statements, which are expectations only, reflect management's current views, are based on certain assumptions, and involve risks and uncertainties. Actual results, events, or performance may differ materially from the above forward-looking statements due to a number of important factors, and will be dependent upon a variety of factors, including, but not limited to, introduction of competing products by other companies, lack of market acceptance of the Ultra Furnace, and economic concerns, including the unpredictability of current markets resulting from the ongoing COVID-19 pandemic.
+86 21 50808868
Source: ACM Research (Shanghai), Inc.